Angle-resolved single-wavelength 1D inverse profiling with a CSI approach

Abstract

We study the behavior of the contrast source inversion method in case of a one-dimensional electromagnetic inverse profiling problem with angular data only. We analyze the update strategy via a local quadratic approximation, which leads to a modification in the update strategy for the contrast source. With this modification, we obtain significant improved results when reconstructing with angular data. Additionally, we discuss conditions for the angles of incidence for which it is most likely to have a successful reconstruction.