Three-dimensional imaging using digital holography and scanning electron microscopy

Abstract

In this work, we present a patented procedure that generates three dimensional (3D) image of a microscopic object with high definition, obtained by merging Scanning Electron Microscopy (SEM) and Digital Holography Microscopy (DHM) data. A high spatial resolution (up to rz=λ/20, ryx≅100nm) 3D model of the object is generated starting from two digital images, acquired separately, following standard characterization procedures. Then, the two set of data are combined using an original mathematical algorithm, which has been implemented with a commercially available software. The developed methodology is of broad interest and has been applied to elements of biological interest, in order to prove its features.