Two-Dimensional Scanning Liquid Crystal Infrared Reflect Array

J. Sanford, J. D. Evans
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Abstract

We present a new reflectarray technology capable of scanning in two dimensions. The device is a reflective semiconductor chip composed of small two-stage phase delay cavities filled with electrically biased liquid crystal. The scanning is enabled by changes in the AC electrical bias, which modifies the effective dielectric constant of the liquid crystal. This enables each cavity to delay the fields in each stage by as much as 360 degrees. As a result, the two-stage cavity allows nearly independent scanning in two orthogonal planes. The structure operates at a wavelength of 1550nm and is manufactured using a standard damascene process.
二维扫描液晶红外反射阵列
我们提出了一种新的二维扫描反射技术。该器件是由充满电偏置液晶的小两级相位延迟腔组成的反射半导体芯片。扫描是通过改变交流电偏压来实现的,这改变了液晶的有效介电常数。这使得每个空腔可以将每个阶段的场延迟360度。因此,两级腔允许在两个正交平面上几乎独立的扫描。该结构的工作波长为1550nm,采用标准的大马士革工艺制造。
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