Testing of annular hyperboloid mirror for Cassegrain system

Sanfeng Hao, Jian Zhang, F. An, Jianfeng Yang
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Abstract

This paper introduces the testing of annular hyperboloid mirror with 460mm diameter in the Cassegrain system. To improve the testing efficiency and meet the requirements of utilization, the study is carried out from three stages: precision grinding, precision polishing, and optical coating. In the precision grinding stage, the annular Zernike polynomial is used to fit the measured surface combining with the data measured from the coordinate measuring machine, so that it can facilitate the testing of the distribution of the surface shape deviation over the entire surface. During the precision polishing stage, a feasible Offner compensator is designed to achieve the goal of high-precision testing of the hyperboloid surface, with a measurement accuracy of RMS≤0.02λ. Also, 0.5-0.7μm and 3-5μm dual-band high reflectivity and high uniformity reflective coating is designed for the Cassegrain system requirements, the actual test reflectivity is 96.2%, which can meet the design requirements.
卡塞格伦系统环形双曲面反射镜的测试
介绍了在卡塞格伦系统中对直径为460mm的环形双曲面反射镜的测试。为提高检测效率,满足利用要求,从精密磨削、精密抛光、光学镀膜三个阶段进行研究。在精密磨削阶段,结合三坐标测量机的测量数据,采用环形泽尼克多项式对被测曲面进行拟合,便于测试曲面形状偏差在整个曲面上的分布情况。在精密抛光阶段,设计了一种可行的Offner补偿器,实现了双曲面表面的高精度测试,测量精度RMS≤0.02λ。针对Cassegrain系统要求,设计了0.5 ~ 0.7μm和3 ~ 5μm双频高反射率高均匀性反射涂层,实际测试反射率为96.2%,满足设计要求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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