Optical Probing of Nanoscopic Insulating Layered Structures via Differential Characteristics of Specular Reflection of Light

P. Adamson
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引用次数: 3

Abstract

The reflection of linearly polarized light from an N-layer system of nanometer-size insulating films is investigated. The approximate formulas for reflection coefficients of s- or p-polarized light are derived and their accuracy is estimated. It is shown that expressions obtained for differential reflection characteristics are of immediate interest to the solution of the inverse problem for nanoscopic layered structures. A few novel options are developed for determining the parameters of nanometer-size insulating layers by differential reflectance measurements, particularly at the Brewster angle. For determining the parameters of multilayer systems an appropriate method is found by combining differential reflectance with ellipsometry.
基于光的镜面反射特性的纳米绝缘层状结构的光学探测
研究了线偏振光在n层纳米绝缘薄膜中的反射。导出了s-或p-偏振光反射系数的近似公式,并对其精度进行了估计。结果表明,得到的微分反射特性表达式对求解纳米层状结构的反问题具有直接意义。通过微分反射率测量,特别是在布鲁斯特角,开发了一些新的选择来确定纳米尺寸绝缘层的参数。为确定多层系统的参数,提出了一种将微分反射率与椭圆偏振法相结合的方法。
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