FEM model of electrostatically actuated MEMS temperature sensor

Abstract

Micro electromechanical system (MEMS) is an emerging technology that gives high accuracy and high speed with least error due to the micro dimension. To design a simple but accurate MEMS sensors remains a challenge. Modeling of a MEMS temperature sensor, using simple microcantilever structure, is represented in this paper. The sensor is actuated electrostatically. The effect of temperature on the resonance was calculated ANSYS software. The device was made of copper (contact electrode), silicon (vibrating part) and silicon oxide (insulation layer). When the temperature varies the properties of the MEMS device also changes and hence the resonance frequency.