Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56MHz RF Plasma System

Abstract

This paper introduces auto bias electrical variable capacitor(EVC) with reduced active components and voltage, current stress that mitigated switch noise for 13.56MHz RF plasma process. The proposed circuit have a small volume and low cost of EVC by using a small number of active components for the variable operation of the electrical variable capacitor, and enables more effective use in high-power systems through low switch voltage and current stress. In addition, the RF component flowing through the switch is effectively blocked to increase the operational reliability of the switch. The proposed circuit can be effectively replaced in the impedance matching network of RF plasma systems that require high power and high reliability.