Modeling and simulation using finite element method of MEMS based micro pressure sensor

Abstract

MEMS are systems of small size, light weight, enhanced performance and reliability finding widest of applications in sectors of Automotive, instrumentation and environment area, especially in aspects of weather monitoring and forecast. Nowadays it has become common for scientist and engineers working in micro-electro mechanical system area to simulate the structure using simulation software like COMSOL before actual fabrication. The software helps to create the structure, mesh it and then simulate. In this paper we have modeled and simulated the micro pressure sensor wish can be used to determine the environment pressure with for example piezoresistive detection. The analysis is carried out for different parameters. In this work we need to study the stress repartition on the Silicon membrane surface. This study is very important because it allows us to determinate where the stress is maximal and to place there the four piezoresistors, wish provides a maximal sensitivity to the pressure. Differing from traditional silicon piezoresistive pressure sensor, we use platinum piezoresistive pressure sensor, in wish platinium is used as the piezoresistor material of pressure sensor. We use platinium as the sensing material of pressure sensor to simplify the fabrication process to integrate pressure sensor into for example multisensor for micro wheather station.