A Finite Element Simulation of the Propagation Properties Shear Surface Acoustic Wave Devices

Abstract

In this paper, the propagation properties of Love wave are analyzed from the wave equation of Love wave. According to the condition of generating Love wave, the model using ST-90°X quartz wafer as substrate and SiO2 as overlay is simulated by ANSYS finite element software. The various velocities are calculated by the data of various modes, then the diagram of the velocity and frequency is drawn using the Lagrange interpolation function, which can prove the dispersion characteristics of Love wave. The Love wave device with 83MHz center frequency is designed according to the relationship between velocity and frequency, and its insertion loss is 10dB. The velocity of Love wave at 83MHz is calculated as 4922m/s according to the period of Interdigital transducer (IDT) and the amplitude-frequency characteristics measured by network analyzer, which is consistent with the simulation results.