High Efficiency Binary Blazed Grating Waveguide Couplers

M. D. Watson, M. Abushagur, P. Ashley, H. Cole
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Abstract

Blazed grating features result in a modification to the Bragg which yields only a single output radiation mode (either substrate or cladding). [1]. Since blazing requires a triangular grating line shape, fabrication can be difficult. As a simplification, a discrete step approximation is often used to approximate a blazed structure. However, the discrete approximation requires multiple exposure steps making the fabrication process complex. The fabrication process can greatly simplified by approximating the blazed grating line shape by a periodic rectangular grating with a varying duty cycle [2]. Thus, the process used to fabricate periodic rectangular gratings can be used to fabricate the binary approximation of a blazed grating. Dividing the blazed grating structure into several (I), substructures, results in a substructure (i), each having a different discrete refractive index based on their location along the slope as shown in Figure 1.
高效率二元燃烧光栅波导耦合器
燃烧光栅的特点导致布拉格的修改,只产生一个单一的输出辐射模式(要么基片或包层)。[1]. 由于燃烧需要三角形光栅线形,制造起来很困难。作为一种简化方法,离散阶跃近似常用于近似燃烧结构。然而,离散近似需要多个曝光步骤,使得制造过程复杂。用变占空比的周期性矩形光栅近似燃烧光栅的线形,可以大大简化制作过程[2]。因此,用于制造周期性矩形光栅的工艺可用于制造燃烧光栅的二元近似。将燃烧光栅结构划分为几个子结构(I),得到子结构(I),每个子结构根据其沿斜率的位置具有不同的离散折射率,如图1所示。
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