B. Neuenschwander, M. Gafner, Christoph Wildbolz, S. Remund, M. Chaja
{"title":"Machining of (100), (110) and (111) oriented Silicon and Germanium with ultrashort laser pulses","authors":"B. Neuenschwander, M. Gafner, Christoph Wildbolz, S. Remund, M. Chaja","doi":"10.1364/lac.2021.lw3b.3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":439568,"journal":{"name":"Laser Applications Conference","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Applications Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/lac.2021.lw3b.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}