{"title":"Chapter 12 Intrinsic stress of epitaxial thin films and surface layers","authors":"R. Koch","doi":"10.1016/S1571-0785(97)80015-6","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":374098,"journal":{"name":"The Chemical Physics of Solid Surfaces","volume":"363 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Chemical Physics of Solid Surfaces","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S1571-0785(97)80015-6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}