Optical coupler fabrication on based buried field-assisted ion-exchange method

H.R. Azarinia
{"title":"Optical coupler fabrication on based buried field-assisted ion-exchange method","authors":"H.R. Azarinia","doi":"10.1109/ISIE.1999.797013","DOIUrl":null,"url":null,"abstract":"A method for fabricating optical directional couplers by combining thermal and field assisted ion exchange processes is presented. Modeling, design, fabrication, and test methods are discussed. This method estimates the need for high-resolution lithography that is needed in conventional methods of computer fabrication.","PeriodicalId":227402,"journal":{"name":"ISIE '99. Proceedings of the IEEE International Symposium on Industrial Electronics (Cat. No.99TH8465)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1999-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISIE '99. Proceedings of the IEEE International Symposium on Industrial Electronics (Cat. No.99TH8465)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIE.1999.797013","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

A method for fabricating optical directional couplers by combining thermal and field assisted ion exchange processes is presented. Modeling, design, fabrication, and test methods are discussed. This method estimates the need for high-resolution lithography that is needed in conventional methods of computer fabrication.
基于埋场辅助离子交换法的光耦合器制备
提出了一种结合热辅助和场辅助离子交换工艺制备光定向耦合器的方法。讨论了建模、设计、制造和测试方法。该方法估计了传统计算机制造方法所需的高分辨率光刻技术的需求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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