{"title":"Defect generation/passivation by low energy hydrogen implant for silicon solar cells","authors":"B. Sopori, T. Zhou, G. Rozgonyi","doi":"10.1109/PVSC.1990.111699","DOIUrl":null,"url":null,"abstract":"Low-energy ion implant in silicon is shown to produce defects including surface damage, hydrogen agglomeration, formation of platelets with","PeriodicalId":211778,"journal":{"name":"IEEE Conference on Photovoltaic Specialists","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Conference on Photovoltaic Specialists","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PVSC.1990.111699","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Low-energy ion implant in silicon is shown to produce defects including surface damage, hydrogen agglomeration, formation of platelets with
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