Microelectromechanical scanning devices for optical networking applications

2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) Pub Date : 2002-08-07 DOI:10.1109/ISSCC.2002.993080

M. Wu, D. Hah, P. Patterson, H. Toshiyoshi

引用次数: 3

Abstract

The state-of-the-art of optical MEMS devices for optical networking applications is reviewed, and a scanning micromirror with angular vertical comb (AVC) actuators is introduced. The AVC scanner uses a single etching process and is completely self-aligned. It has 50% larger scan angle than conventional vertical comb devices. Resonant frequency is 630 Hz.

查看原文本刊更多论文

用于光网络应用的微机电扫描装置

综述了用于光网络应用的光学MEMS器件的研究进展，介绍了一种带角垂直梳状(AVC)驱动器的扫描微镜。AVC扫描仪采用单一蚀刻工艺，完全自对准。它的扫描角度比传统的垂直梳子设备大50%。共振频率为630赫兹。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315)

自引率

0.00%

发文量