Current Developments in Surface Figure Metrology

J. Greivenkamp, Russell J. Palum
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Abstract

This review paper will examine the current state of optical testing for surface figure metrology. We will look at recent trends in commercial instruments as well as new developments in the technology of optical testing. This discussion will include topics such as software versatility and processing speed, high-speed data collection, new processing algorithms, long-trace optical profilers, larger data arrays, interfaces between interferometers and design programs, and aspheric testing. We will include our most recent results from our work in sub-Nyquist interferometry for measuring aspheric surfaces. The talk will conclude with a brief discussion of the current and future challenges that are facing the optical testing community.
曲面图形测量的最新进展
本文综述了表面图形测量光学检测的现状。我们将研究商业仪器的最新趋势以及光学测试技术的新发展。本次讨论将包括软件的多功能性和处理速度、高速数据收集、新的处理算法、长迹光学剖面仪、更大的数据阵列、干涉仪和设计程序之间的接口以及非球面测试等主题。我们将包括我们在测量非球面的亚奈奎斯特干涉测量中的最新成果。讲座最后将简要讨论当前和未来光学测试社区面临的挑战。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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