Simple Laser Microinterferometer for Spaceborne Measurements

Abstract

Laser interferometer consists of laser, point-like mirror, forming aberration-free beam of light (reference beam), and analyzer beam reflecting by a mirror system to be tested. The analyzer beam is directed to viewing screen or CCD, and it is recombined with the reference beam to produce a system of Twyman-Green fringes. Microinterferometer is very small, simple and lightweight, that is why it is especially recommended for testing optics of the space telescopes in the space, and extreme UV lithography