Fiber interferometer combining sub-nm displacement resolution with miniaturized sensor head

Abstract

The presented interferometer concept enables high-accuracy target displacement measurement in difficult accessible locations and the development of small fiber optic sensor to measure other physical parameters e.g. pressure, vibration, gravity force, etc. Furthermore, this configuration is basically insensitive to disturbances to the lead fiber between the passive sensor head and the measurement system including the electro-optical parts and the detection interferometer. Two test setups are built and tested to demonstrate the feasibility of high-speed measurement up to 50 kHz, low system drift of ∼0.5 nm over 500 s and a low displacement noise level down to 2.8 pm/V Hz.