The effects of boundary layer and thermal gradient upon GaN growth

S.R. Chung, J. Chen, T. Worchesky
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引用次数: 1

Abstract

Gallium nitride (GaN) is a very promising material for short wavelength optoelectronic devices. Recently, much progress has been made on device fabrication, but little is still known about the growth parameters of GaN. We have studied two of the parameters effecting the growth of high quality GaN. The boundary layer plays an important role in the growth of most III-V materials but no data is currently available upon it's effect on GaN growth. Likewise, very few results are available on the effect of the thermal gradient upon the growth of single crystal GaN.
边界层和热梯度对氮化镓生长的影响
氮化镓(GaN)是一种非常有前途的短波光电器件材料。近年来,在器件制造方面取得了很大进展,但对GaN的生长参数仍然知之甚少。我们研究了影响高质量氮化镓生长的两个参数。边界层在大多数III-V型材料的生长中起着重要的作用,但目前还没有关于它对GaN生长的影响的数据。同样,关于热梯度对单晶氮化镓生长的影响的研究结果也很少。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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