Complex permittivity measurements of thin films using microdielectrometry

Abstract

Classical dielectrometry illustrates how important information concerning the physical properties and state of a media can be obtained from the electrical frequency response. The modal approach to dielectrometry described here not only extracts its information from the control of the temporal frequency, but also from the imposition of a spatial periodicity as well. In this “imposed ω-k” technique, the medium is excited at the temporal (angular) frequency ω by means of an interdigital electrode structure having a spatial periodicity length X = 2π/k and hence a dominant wavenumber k.