MOCVD growth of InP by phosphine modulation

Abstract

A new epitaxial growth process was developed using phosphine modulation using conventional metal-organic chemical vapor deposition (MOCVD). With this method, phosphine was switched off a short time in each cycle and provided a metal-rich growth surface. With higher surface mobility of indium atoms than that of InP molecules, crystal quality was improved significantly. Photoluminescence full width at half maximum of 5.6 meV at 77 K was achieved under optimum growth conditions.<>