Design of tunable shunt and series interdigital capacitors based on vanadium dioxide thin film

Abstract

Tunable coplanar waveguide interdigital capacitors (IDC) designed with vanadium dioxide (VO2) thin film are presented in this paper. Two different configurations, series IDC and shunt IDC, are proposed. Tunable capacitance can be implemented by the thermally controllable VO2 thin film. The tunability of IDC structures are 95.6% and 85.4% corresponding to the series IDC and shunt IDC, respectively.