Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides

3rd IEEE International Conference on Group IV Photonics, 2006. Pub Date : 2006-10-02 DOI:10.1109/GROUP4.2006.1708179

J. Schrauwen, D. van Thourhout, R. Baets

引用次数: 27

Abstract

We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques

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聚焦离子束在绝缘体上硅波导上制造垂直光纤耦合器

我们在聚焦离子束的绝缘体上硅波导中制造光栅耦合器。最初的器件损耗很大，但通过使用选择性蚀刻剂和硬掩膜，我们获得了与传统制造技术相当的效率

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

3rd IEEE International Conference on Group IV Photonics, 2006.

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