Fabrication of micro-channels and waveguides by fs-laser direct writing in glasses

Abstract

Compact lasers with emission e.g. in the visible spectral range are eligible for display technology, medicine and cosmetics. Erbium- and Praseodym-doped fluoride glass materials are eligible candidates for visible emission. Non-doped waveguides may find their use for beam guiding and shaping of diode laser radiation. For applications in micro-fluidics, micro mechanical systems and medical diagnostics micro-channels and hollow microstructures in fused silica are necessary. Micro-channels in fused silica and waveguides in laser active glass materials are fabricated with fs-laser pulses. The use of a high repetition rate laser and a fast scanning system potentially allow the fabrication of laser sources and micro-mechanical components with high speed.