Evaluation of Interfacial Strength of Copper Thin Film on Printed Circuit Board with Micro Cutting System

M. Omiya, I. Nishiyama
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引用次数: 1

Abstract

The purpose of this paper is to develop the evaluation method of interfacial strengths with a micro cutting system. The interfacial strength of thin films is crucial for the reliability assessment of electronics packages and MEMS devices. There have been a lot of experimental and theoretical studies about the measurement of interfacial strengths. However, it is still under developing stages, because it is quite difficult to measure it quantitatively for micro- and nano-thickness films. Recently, SAICAS(Surface and Interfacial Cutting Analysis System) has been developed and used for the evaluation of the mechanical properties in micro- and nano-thickness films. In this paper, we developed the theoretical model of SAICAS micro cutting tests and proposed the evaluation method of interfacial strength for thin films systems. The proposed method was applied to copper thin films on printed circuit boards and compared with 90° peel tests. The results show that the proposed method can exclude the plastic and friction dissipation energies during the SAICAS tests and quantitatively evaluate the interfacial strength.
用微切割系统评价印刷电路板上铜薄膜的界面强度
本文的目的是建立一种基于微切削系统的界面强度评价方法。薄膜的界面强度对电子封装和MEMS器件的可靠性评估至关重要。关于界面强度的测量,已有大量的实验和理论研究。然而,由于对微纳米厚度薄膜的定量测量相当困难,目前尚处于发展阶段。最近,SAICAS(表面和界面切割分析系统)被开发出来并用于评价微纳米厚度薄膜的力学性能。本文建立了SAICAS微切削试验的理论模型,提出了薄膜系统界面强度的评价方法。将该方法应用于印刷电路板上的铜薄膜,并与90°剥离试验进行了比较。结果表明,该方法可以排除SAICAS试验中的塑性耗散能和摩擦耗散能,定量评价界面强度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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