Ternary comb-like silicon photonic crystal: Oxidation, intrinsic modes, reflection windows and contrastivity

Abstract

A ternary photonic crystal - A/B/A/C periodic structure is investigated analytically and numerically in the framework of transfer matrix formalism. The influence of oxidation to photonic gaps and positions of reflection windows for (SiO2/Si/SiO2/Air)N structure is calculated. It was shown that intrinsic optical contrastivity has a non-monotone behavior during the process of oxidation of silicon. The found results will allow to determine the optimal regimes of oxidation to obtain needed photonic device properties.