Submicron gratings with dielectric overcoat: performance and stability

C. Heine, R. Morf, M. T. Gale
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Abstract

Submicron gratings show increasing potential in applied optics, often presenting attractive alternatives to thin film technology solutions. Gratings on light-weight plastic materials can replace heavy and expensive glass devices. Embossing techniques can be used for cheap mass production. The coating of gratings with thin films leads to additional degrees of freedom for component design. For practical applications, it is important not only to investigate the possibilities of such structures, but also the limiting factors such as fabrication considerations and stability properties.
具有介电涂层的亚微米光栅:性能和稳定性
亚微米光栅在应用光学中显示出越来越大的潜力,通常是薄膜技术解决方案的有吸引力的替代品。在轻质塑料材料上的光栅可以取代笨重而昂贵的玻璃器件。压花技术可以用于廉价的批量生产。用薄膜涂覆光栅为元件设计提供了额外的自由度。在实际应用中,不仅要研究这种结构的可能性,而且要考虑制造考虑和稳定性等限制因素。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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