Yield Enhancement

2021 IEEE International Roadmap for Devices and Systems Outbriefs Pub Date : 2021-11-01 DOI:10.1109/smtw.2004.1393719

D. Wilcox, Slava Libman

引用次数: 7

Abstract

The Yield Enhancement focus area is dedicated to activity ensuring that semiconductor manufacturing set up is optimized towards identifying, reducing, and avoiding yield-relevant defects and contamination.

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产量提高

良率提高重点领域致力于确保半导体制造设置优化，以识别，减少和避免与良率相关的缺陷和污染。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2021 IEEE International Roadmap for Devices and Systems Outbriefs

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