A widely-variable optical attenuator for multimode fibers with a MEMS micromirror

M. Fujino, Hirotake Maruyama, Y. Goto, Michiko Nakanishi, A. Kobayashi, H. Kawashima, T. Yuasa, I. Ishinabe, H. Tamura
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Abstract

MEMS-based variable optical attenuators (VOAs) using a shutter, a mirror, or a grating have been proposed in the field of optical telecommunication [1]. The MEMS-based VOAs used in optical telecommunication, however, are not suitable for optical instruments, in which a light beam is not always single mode ( i.e. is low spatially coherent) and optical power to be regulated can substantially vary (≫ 40 dB).
基于MEMS微镜的多模光纤宽可变光衰减器
基于mems的可变光衰减器(VOAs)使用快门、镜子或光栅已经在光通信领域被提出[1]。然而,用于光通信的基于mems的VOAs并不适合光学仪器,因为光束并不总是单模(即低空间相干),并且要调节的光功率可以有很大的变化(> 40 dB)。
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