X-ray topography studies on the influence of the mass-loading effect on resonator parameters

Abstract

In this paper the results of electrical measurements of the mass-loading influence on AT-cut quartz resonator parameters are compared with those obtained by X-ray topography analysis of the same resonators. Based on the Ballato's transmission-line analogs of the trapped-energy resonators vibrating in thickness-shear mode, the mass-loading effect on resonator characteristics was studied and the effective mass-loading, motional inductance and quality factor of quartz resonators were computed. X-ray topography measurements were performed by transmission diffraction using the synchrotron radiation. Sawyer plan-parallel polished AT quartz resonators with 14 mm diameter, 5 MHz frequency, Au electrodes with various structures, diameters and thickness were used in experiments. The results of the X-ray topography investigations are in agreement with the previous ones obtained by electrical measurements.