Two Modes of Transportation of a High Current Ion Beam with Ballistic Focusing

T. Koval, V. Tarakanov
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Abstract

Ion sources are used to modify surface layers of different materials and manufactured items. The minimization of radiation damage of treated surfaces sets the trend to decrease the ion beam energy (< 1.5 keV). The dynamic ion beam compensation and the ion beam plasma generation should be considered to control the transport of the metallic low-energy ion beam with ballistic focusing. The ion beam transport with ballistic focusing in the equipotential drift space is studied with numerical simulation by the 2.5D axial symmetric version of the KARAT electromagnetic PiC code. It is shown that the collector current changes to the pulsed mode when the injected ion energy $W < W_{c}$, where $W_{c}$ is critical energy that depends on the gas concentration and the injected ion current. The pulsed mode is the result of the virtual anode (VA) formation and its compensation by secondary electrons. In hemispherical drift space with curvature radius of 7.5 cm, the critical energy $W_{c}=2 \text{keV}$ when the transported ion current $I_{b}=1\ \mathrm{A}$ and the gas concentration $n_{g}=10^{13}\ \text{cm}^{-3}$. The oscillation frequency of the collector current depends on energy, the system geometry and the gas concentration. The oscillating mode of the collector current when decreasing the energy ($W < W_{c}$) of the transported ions is a result of the decreased role of secondary electrons in compensating the ion beam space charge. This leads to alternating formations: the VA formation when compensation of the space charge of the beam ions compensated. Plasma in the beam transport area is formed. A critical factor that impacts the ion beam transport mode is the electron heating under the increased plasma instability. All these processes are considered in the proposed PiC simulation. The time required to the ion-beam plasma formation and the period of the collector current pulses decrease as the transported ion energy $W$ and the gas concentration increase.
具有弹道聚焦的大电流离子束的两种输运模式
离子源用于修饰不同材料和制成品的表层。处理表面辐射损伤的最小化设定了降低离子束能量(< 1.5 keV)的趋势。为了控制具有弹道聚焦的金属低能离子束的输运,需要考虑动态离子束补偿和离子束等离子体的产生。利用2.5D轴对称KARAT电磁PiC程序,对等势漂移空间中具有弹道聚焦的离子束输运进行了数值模拟研究。结果表明,当注入离子能量$W < W_{c}$时,集电极电流转变为脉冲模式,其中$W_{c}$是取决于气体浓度和注入离子电流的临界能量。脉冲模式是虚阳极(VA)形成和二次电子补偿的结果。在曲率半径为7.5 cm的半球形漂移空间中,当输运离子电流$I_{b}=1\ \math {A}$,气体浓度$n_{g}=10^{13}\ \text{cm}^{-3}$时,临界能量$W_{c}=2 \text{keV}$。集电极电流的振荡频率取决于能量、系统几何形状和气体浓度。当输运离子的能量($W < W_{c}$)减小时,集电极电流的振荡模式是次级电子补偿离子束空间电荷作用减小的结果。这导致交替形成:当补偿的空间电荷的离子束补偿时,形成的VA。在束流输运区形成等离子体。影响离子束输运模式的一个关键因素是等离子体不稳定性增加下的电子加热。所提出的PiC仿真考虑了所有这些过程。离子束等离子体形成所需时间和集电极电流脉冲周期随着离子能量的增加和气体浓度的增加而减小。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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