Development Of An Soi-Based Micro Check Valve

Abstract

This paper presents a bulk micromachined check valve with very high frequency and extremely low leak rates. The valve is designed to have a hexagonal orifice, a hexagonal membrane flap and three flexible tethers. The three elbow-shaped flexible tethers are used both to secure the membrane flap to the valve seat and to abtain a large flap displacement in the forward flow direction. SOI wafer and DRIE technology are used to implement this micro valve. A very simple farbication process has been developed, and only two photolithographic masks are employed. Preliminary testing on a 1.5 milimeters size check valve shows that a maximum flow rate (DI water) of 35.6ml/min was obtained at pressure drop of 65.5kPa and negligible leakage rate in the reverse flow direction observed at pressure up to 600kPa.