Two-Dimensional MTF and Crosstalk Characterization for CMOS Image Sensors

Abstract

This work describes a new approach to CMOS Image Sensors (CIS) characterization, based on the Submicron Scanning System (S-cube system). The S-cube system inherently enables two-dimensional responsivity map acquisition for CISs and provides a 2-D pixel Point Spread Function (PSF), 2-D pixel Modulation Transfer Function (MTF) and 2-D sensor crosstalk (CTK) measurements. The effectiveness and advantages of the proposed method are shown; enabling to determine both, the influence of each pixel-composing element on its overall signal, and sensor resolution abilities characterization for each wavelength of interest. The advantages and necessity of 2-D characterization for sensor performance understanding and improvement are clearly emphasized.