DEFECT FORMATION IN DISLOCATION-FREE SILICON SINGLE CRYSTALS

N. Verezub, A. Prostomolotov
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Abstract

The physical concepts of defect formation processes in dislocation-free silicon single crystals are discussed. Mathematical models of these processes are considered for various temperature ranges realized during their growth. Near the crystallization temperature, the processes of fast recombination and transfer of intrinsic point defects (vacancies and interstitial silicon atoms) are considered in detail, the calculation results of which are verified by the experimental data of the carrier lifetime map in a silicon single crystal 150 mm in diameter grown by Czochralski method
无位错硅单晶中的缺陷形成
讨论了无位错硅单晶中缺陷形成过程的物理概念。这些过程的数学模型考虑了在其生长过程中实现的不同温度范围。在结晶温度附近,详细地考虑了本征点缺陷(空位和间隙硅原子)的快速复合和转移过程,并用Czochralski法生长直径为150 mm的硅单晶载流子寿命图的实验数据验证了计算结果
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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