On the matching behavior of MOSFET small signal parameters

Abstract

An array test structure for precise characterization of the matching behavior of MOSFETs is presented. Besides the standard mismatch parameter drain current I/sub D/, the high resolution measurement principle allows the characterization of the small signal parameters transconductance g/sub m/ and in particular differential output conductance g/sub DS/. Measured data are shown to demonstrate the performance of the method. Whereas for the normalized standard deviations of I/sub D/ and g/sub m/ the well known proportionality to (WL)/sup -1/2/ is obtained, the normalized standard deviation of g/sub DS/ clearly deviates from this width and length dependence. For this parameter, proportionality to W/sup -1/2/ is found.