Silicon components for gas chromatograph

Optoelectronic and Electronic Sensors Pub Date : 2001-08-08 DOI:10.1117/12.435932

J. Dziuban, A. Gorecka-Drzazga, K. Malecki, L. Nieradko, J. Mroz, M. Szczygielska

引用次数: 6

Abstract

A gas analyzer based on chromatography method using silicon- glass components has been built. Its main components were made by using MAMS-like technology, and its conception is concurrent to the idea of an integrated silicon chromatography proposed by SC Terry.

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气相色谱仪用硅元件

建立了一种基于硅玻璃组分色谱法的气体分析仪。它的主要成分是采用类似mams的技术制造的，其概念与SC Terry提出的集成硅色谱的想法是一致的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optoelectronic and Electronic Sensors

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