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A Research On The Anisotropic Etching Of Tungsten-Nitride For X-Ray Mask

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) Pub Date : 1998-07-13 DOI:10.1109/IMNC.1998.730003
H.G. Lee, C. Jeong, S.Y. Lee, J. Ahn, K. Song, C.K. Park, Y. Jeon, D.H. Lee
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Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)
Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)
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