A comprehensive model of beams' anisoelasticity in MEMS gyroscopes, with focus on the effect of axial non-vertical etching

Abstract

This paper describes a comprehensive approach to model and efficiently simulate the behavior of MEMS gyroscopes in presence of beams' anisoelasticity, that causes out-of-plane mechanical quadrature. Special focus is given to the effects of non-vertical etching along the axial direction of flexural beams, which have been poorly investigated in the literature. A device-level numerical simulation tool to evaluate the effects of beams' anisoelasticity on quadrature is developed and validated through the comparison with 3D FEM simulations.