{"title":"Silicon solar cell process monitoring by PV-reflectometer","authors":"B. Sopori, Yi Zhang, Wei Chen, J. Madjdpour","doi":"10.1109/PVSC.2000.915769","DOIUrl":null,"url":null,"abstract":"A new instrument, the PV-reflectometer, is developed for process control and monitoring in PV industry. This system can rapidly measure a host of parameters averaged over the entire wafer/cell. Here we describe the main features of the instrument and its applications for monitoring various Si solar cell fabrication processes, including sawing, texturing, AR coating, and front and back metallization.","PeriodicalId":139803,"journal":{"name":"Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036)","volume":"360 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PVSC.2000.915769","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12
Abstract
A new instrument, the PV-reflectometer, is developed for process control and monitoring in PV industry. This system can rapidly measure a host of parameters averaged over the entire wafer/cell. Here we describe the main features of the instrument and its applications for monitoring various Si solar cell fabrication processes, including sawing, texturing, AR coating, and front and back metallization.