The Comprehensive Error Modeling of Aspheric Surface Accuracy Detection Device

Abstract

In view of the shortcomings of the current aspheric surface detection equipment, a new aspheric surface detection principle based on the most approximate circle method is proposed, the general structure of the aspheric surface precision detector based on the principle of the closest circle is introduced in detail, and the topology and low sequence array of the detector are established through theoretical analysis, and carries on the detection device coordinate system the concrete setting. At the same time, applying the theory of multi-body system, aiming at the distribution of degrees of freedom among the parts of aspheric surface shape detector and the set generalized coordinate system, the ideal transformation matrix and zero-order motion equation between adjacent bodies of aspheric surface shape detector are established. Finally, the error model of the detector is synthetically established, and the correctness of the mathematical model is checked, it lays a solid foundation for the follow-up error compensation research.