Evaluation of the efficiency of the simplified simulator of the optical coating deposition process

Abstract

The paper presents a comparison of the results of simulating the processes of deposition of optical coatings using a simplified simulator and a full simulator that takes into account the main error-producing factors of deposition processes and control of coating layer thicknesses. For the simulators under consideration, the distributions of error vector norms in the layer thicknesses of coating, layer error correlation coefficients, and error self-compensation coefficients are calculated. It is shown that the simplified simulator allows one to obtain adequate results for evaluating the deposition process of real multilayer optical coatings and, thus, can be used for faster modeling of a large number of coatings with further analysis of their stability against manufacturing errors.