Particle Concentration Using Electroactuated Nanopumps

Abstract

There are no developed methods of pumping fluids on the nano-scale without contaminating the sample being pumped. This paper describes a nano-electromechanical system device intended for pumping fluids and trapping particles. This device can improve accuracy of fast viral testing, increase the capabilities of target drug delivery, and be used in Lab-On-a-Chip systems to transport fluids and concentrate samples. We detail its structure and important fabrication techniques, as well as present preliminary characterization test results.