A novel structure of AlN/SiO2/Si, AlN/Si SAW filter

Abstract

This paper concerns the design and characterization of a novel structure surface acoustic wave (SAW) filter. The models for 2P and 3P configuration SAW filters are presented. The major subjects of interest for performance analysis of SAW filters are the transmission coefficient and reflection coefficient versus frequency. Network analyzer HP 8753E was used for this purpose. Comparisons between our novel structure and normal structure of different SAW filters are presented.