Detailed investigation of the DLC films in the transmissive photocathode DC gun application

2014 2nd 2014 2nd International Conference on Emission Electronics (ICEE) Pub Date : 2014-09-08 DOI:10.1109/EMISSION.2014.6893973

N. I. Balalykin, A. A. Feschenko, M. Nozdrin, Iozef Huran

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引用次数: 3

Abstract

Photocathode electron guns are key devices for high quality electron bunches generation. Development of the original photocathode conception - backside illuminated transmissive (for laser beam) photocathode - is going on at the Photo-gun test bench of the Joint Institute for Nuclear Research (JINR). Such cathode has an improved (in comparison with “classic” photocathode) quantum efficiency due to vectorial photoelectric effect. The influence of the diamond-like carbon (DLC) films production technology on quantum efficiency of prepared photocathode has been investigated. DLC films were deposited on silicon substrate and stainless steel mesh by plasma enhanced chemical vapor deposition from gas mixture CH4+Dz(Hz)+Ar and reactive magnetron sputtering using carbon target and gas mixture Ar and Dz(Hz). The concentration of elements in films was determined by Rutherford backscattering spectrometry and Elastic recoil detection analytical methods simultaneously. Raman spectroscopy at visible excitation wavelength was used for I(D)/I(G) ratio determination. Emission properties of the films were investigated, new results concerning extracted charge and quantum efficiency are presented.

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详细研究了DLC薄膜在透射式光电阴极直流枪中的应用

光电阴极电子枪是产生高质量电子束的关键器件。最初的光电阴极概念——背面照明透射(用于激光束)光电阴极——正在联合核研究所(JINR)的光电枪试验台进行开发。由于矢量光电效应，这种阴极具有改进的量子效率(与“经典”光电阴极相比)。研究了类金刚石(DLC)薄膜制备工艺对制备的光电阴极量子效率的影响。以CH4+Dz(Hz)+Ar为混合气体，采用等离子体增强化学气相沉积的方法在硅衬底和不锈钢网上沉积DLC薄膜，并利用碳靶和Ar和Dz(Hz)混合气体进行反应磁控溅射。采用卢瑟福后向散射光谱法和弹性反冲检测法同时测定薄膜中元素的浓度。采用可见光激发波长拉曼光谱法测定I(D)/I(G)比值。对薄膜的发射特性进行了研究，得到了有关提取电荷和量子效率的新结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2014 2nd 2014 2nd International Conference on Emission Electronics (ICEE)

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