Fabrication of anisotropic nanomaterial by precise and large-area nanowire operation with focused-ion-beam

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI:10.1109/NEMS.2013.6559859

Lurui Zhao, Can Li, D. She, Zhiqiang Wang, Jun Xu, Wengang Wu

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引用次数: 1

Abstract

This paper presents a fabrication method for anisotropic nanomaterial by operating nanowires by focused-ion-beam (FIB) irradiation. After the preparation of one-dimensional nanowire, FIB irradiation is applied on the nanowire to operate its orientation and morphology by choosing irradiation position and area. On one hand, localized FIB irradiation is employed to precisely operate the morphology of the planar ultra-fine nanowire prepared by FIB induced fluidization and self-perfect process driven by the material diffusion process. On the other hand, large area FIB scanning is applied to achieve the orientation adjustment of high-density nanowire bunch and nano-forest obtained by oxygen plasma etching. When nanowire is irradiated, unbalanced stress is introduced at different side, and thus nanowire bends to balance the stress. Based on this approach, both single and large area of nanowire structure can be controlled, and anisotropic nanomaterial is realized.

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聚焦离子束精密、大面积纳米线加工制备各向异性纳米材料

提出了一种利用聚焦离子束辐照操作纳米线制备各向异性纳米材料的方法。一维纳米线制备完成后，通过选择照射位置和照射面积，对纳米线进行FIB照射，对纳米线的取向和形貌进行操作。一方面，采用局部FIB辐照对材料扩散过程驱动的FIB诱导流化和自完善工艺制备的平面超细纳米线的形貌进行精确操作;另一方面，采用大面积FIB扫描实现了氧等离子体刻蚀得到的高密度纳米线束和纳米林的取向调整。当纳米线受到辐照时，在不同侧面引入不平衡应力，纳米线弯曲以平衡应力。在此基础上，实现了单纳米线和大面积纳米线结构的控制，实现了纳米材料的各向异性。

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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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