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Fatigue Strength Evaluation of Thin Film Comprising of Cu Helical Nano-elements Fabricated by Glancing Angle Deposition

The Proceedings of Conference of Kansai Branch Pub Date : 1900-01-01 DOI:10.1299/jsmekansai.2019.94.206
R. Kaneko, Mikiya Yamamoto, T. Sumigawa, T. Kitamura
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掠角沉积法制备Cu螺旋纳米元件薄膜的疲劳强度评价
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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The Proceedings of Conference of Kansai Branch
The Proceedings of Conference of Kansai Branch
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