A Monolithic RF Lowpass Filter on Diamond via Additive Manufacturing

Xenofon Konstantinou, M. Craton, Cristian J. Herrera-Rodriguez, A. Hardy, J. Albrecht, T. Grotjohn, J. Papapolymerou
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Abstract

This paper demonstrates the design, fabrication, and RF testing of a monolithic lowpass filter (LPF) on single-crystalline diamond (SCD). This is the first time an RF filter has been fabricated on SCD. The LPF consists of grounded coplanar waveguide (GCPW) and microstrip (MS) transmission lines, via-less GCPW-to-MS transitions, and a bottom ground plane, all printed on a 5 mm × 5 mm × 0.15 mm SCD wafer with Aerosol Jet Printing technology using silver ink. The LPF is a stepped-impedance filter designed to have a cutoff frequency of 40 GHz and was measured from 10 MHz up to 67 GHz. Our results indicate that SCD is a good platform for the realization of high-frequency RF structures on a single substrate using additive manufacturing techniques.
基于增材制造的金刚石单片RF低通滤波器
本文演示了基于单晶金刚石(SCD)的单片低通滤波器(LPF)的设计、制造和射频测试。这是第一次在SCD上制造射频滤波器。LPF由接地的共面波导(GCPW)和微带(MS)传输线,无通道的GCPW到MS转换以及底部接地面组成,所有这些都使用银墨水使用气溶胶喷射打印技术打印在5mm × 5mm × 0.15 mm的SCD晶圆上。LPF是一种阶跃阻抗滤波器,设计截止频率为40 GHz,测量范围为10 MHz至67 GHz。我们的研究结果表明,SCD是使用增材制造技术在单一衬底上实现高频射频结构的良好平台。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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