MEMS Accelerometer with Screen Printed Piezoelectric Thick Film

2006 5th IEEE Conference on Sensors Pub Date : 2006-10-01 DOI:10.1109/ICSENS.2007.355913

C. Hindrichsen, Erik Vilain Thomsen, R. Lou-Møller, T. Bove

引用次数: 13

Abstract

A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTi1-x)O3 (PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600times3600times500 mum3) and a total chip size of 10times10 mm2. The resonance frequency is found to be 17.5 kHz and the sensitivity 4.15 mV/g for a single beam.

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丝网印刷压电厚膜MEMS加速度计

制备了一种以丝网印刷压电Pb(ZrxTi1-x)O3 (PZT)厚膜(TF)为传感材料的体积微机械压电MEMS加速度计。加速度计采用四梁结构，中心地震质量(3600times500mm3)，芯片总尺寸为10times10mm2。谐振频率为17.5 kHz，灵敏度为4.15 mV/g。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2006 5th IEEE Conference on Sensors

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