Measurement of the sheet resistance of thin metallic films at 130GHz

Abstract

The sheet resistance of thin metallic films has been measured using a transmission technique at 130 GHz. This technique can be used for a range of sheet resistances from a few kilohms down to a few ohms. The microwave results are higher than the corresponding values measured at 0 Hz. For sheet resistances less than a few ohms, the measurement range has been extended downwards using patterned metallic films.