Microactuator using tensile thin film

Abstract

The thin film is advantageous for preparing the compliant spring and structures with little mass. The surface micromachining can take these advantages. Since the film structures suffer from the bending generated by the stress imbalance inside, the bulk micromachining is now frequently used. When the tensile stress is introduced in the thin film combining with bulk micromachining, the structural robustness will be obtained. As for the torsion bar, the compliant spring performance can be obtained for the twisting motion keeping the rigidity against the other motions. The potentials are indicated with the micromirror. The performances of the low-voltage driving, temperature stability, possibility for increasing the resonant frequency by decreasing the mass of the moving element, and the wireless driving using the subtle energy generated by the electromagnetic induction are confirmed.